Applications
• Wet etch and clean
• Dilute acids
• DI water (<80°C)
• Ultrapure electronics-grade gases
• Drying systems


The Proflow™ II-E mini cartridge uses a PTFE membrane along with high-purity polypropylene supports that provide an economical alternative to all-fluoropolymer cartridges. It provides a high degree of retention and cleanliness along with good flow and lifetime. This filter is ideally suited for ultrapure microelectronics fluids and gases. The hydrophobic PTFE membrane serves as a highly efficient barrier to insure low moisture content of gases. Its design uses an internal 116 O-ring that is available in several materials.


Benefits
• Good liquid and gas flow rates
• PTFE/ PP construction for chemical resistance
• Secure internal O-ring seal
• 100% integrity tested in cleanroom environment