Applications
• Wet etch and clean
• Phosphoric acid
• Sulfuric acid
• Hydrofluoric acid
• Nitric acid
• Piranh
• SC1, SC2
•NMP-based solvents
• Other high temperature or ozonated processes


The Fluoroflow®-HSA filter cartridge provides good flow rates and on-stream life. The enhanced pleating provides more than 40% more surface area than our standard Fluoroflow®. This results in increased bath turnover and longer filter lifetime demanded by today’s fabs. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180°C. Available wet-packed for quick installation or Ultraclean wet-packed which offers the lowest metals extractables in the industry.


Benefits
• Increased filtration area for longer life
• Higher flow rates for increased bath turn over
• Wet-pack option for quick installation
• Ultraclean wet-pack option for absolute cleanliness
• All-fluoropolymer for most maximum chemical resistance
• 100% integrity tested for consistent quality