Applications
• Wet etch and clean
• Hot phosphoric acid
• Sulfuric acid
• Hydrofluoric acid
• Nitric acid
• Piranha
• SC1, SC2
• NMP-based solvents
• Other high temperature or ozonated processes


The Fluorocap® encapsulated filter cartridge is our standard product for aggressive wet etch and clean applications. It provides good flow rates and on-stream life at an economical price. The all-fluoropolymer construction provides excellent chemical resistance for the most aggressive applications up to 180°C. Its integral filter design maximizes up-time with safe and simple change-outs. Available wet-packed for quick installation or Ultraclean wet-packed which offers the lowest metals extractables in the industry.


Benefits
• Economical
• Wide range of configurations and ratings
• Wet-pack option for quick installation
• Ultraclean option for absolute cleanliness
• All-fluoropolymer for maximum chemical resistance
• 100% integrity tested for consistent quality